Characterization of photolithographically defined NIS tunnel junctions as X-ray sensors

D. Chow, B. Neuhauser, Matthias Frank, C. A. Mears, R. Abusaidi, M. Cunningham, R. M. Golzarian, D. D. Hake, S. E. Labov, M. A. Lindeman, W. E. Owens, B. Sadoulet, A. Slepoy

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


We are developing normal-insulator-superconductor (NIS) tunnel junctions for use as X-ray detectors for astronomical purposes and as phonon sensors for dark matter detectors. We are using photolithographic techniques to produce structures in which aluminum is the superconductor, Al2O3 is the tunnel barrier, and copper is the normal metal. We describe microfabrication details and present X-ray pulse data.

Original languageEnglish (US)
Pages (from-to)57-60
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Issue number1
StatePublished - Feb 11 1996
Externally publishedYes

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation


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