Calibration of oblique-incidence reflectivity difference for label-free detection of a molecular layer

Chenggang Zhu, Ru Chen, Yuzhangyang Zhu, Xu Wang, Xiangdong Zhu, Lan Mi, Fengyun Zheng, Yiyan Fei

Research output: Contribution to journalArticle

4 Scopus citations

Abstract

Oblique-incidence reflectivity difference (OI-RD) is a form of polarization-modulation ellipsometry that measures properties of thin films on a solid surface through the change in polarization state of light upon reflection from the surface. The measurement accuracy depends on the precision of the phase modulation amplitude and azimuthal alignments of key polarizing optical elements and, thus, requires careful calibration. In the present work, we describe robust methods of such calibrations that enable precise determination of the modulation amplitude and static retardation of a phase modulator and azimuths of key polarizing optics in an OI-RD system.

Original languageEnglish (US)
Pages (from-to)9459-9466
Number of pages8
JournalApplied Optics
Volume55
Issue number33
DOIs
StatePublished - Nov 20 2016

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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