Atomic force microscopy studies of SrTiO3(001) substrates treated by chemical etching and annealing in oxygen

Xu Wang, Yiyan Fei, Huibin Lu, Kuijuan Jin, Xiangdong Zhu, Zhenghao Chen, Yueliang Zhou, Guozhen Yang

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

The SrTiO3(001) substrates treated by chemical etching in NH4F-buffered HF solution and annealing in oxygen ambient have been studied by an atomic force microscopy (AFM). The SrTiO3 substrates with TiO2-terminated and atomically smooth surfaces and single unit cell steps have been obtained. The surface morphologies of SrTiO3 substrates strongly depend on the treated conditions and the quality of the substrates.

Original languageEnglish (US)
Pages (from-to)459-468
Number of pages10
JournalScience in China, Series G: Physics Astronomy
Volume48
Issue number4
DOIs
StatePublished - Aug 2005

Keywords

  • AFM
  • SrTiO
  • Surface defects
  • Surface morphology

ASJC Scopus subject areas

  • General

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