Abstract
We introduce a novel, microfluidic capacitive pressure sensor which uses a high capacitance per unit area at the interface between the metal and ionic liquid. Unlike traditional pressure sensors, which use rigid material constructs, we employ conductive liquid and elastomeric constructs as the sensing medium - a design which is very responsive to applied pressure. A prototyped sensor achieves a sensitivity of 522.5 pF/mmHg.
| Original language | English (US) |
|---|---|
| Title of host publication | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 |
| Pages | 557-560 |
| Number of pages | 4 |
| DOIs | |
| State | Published - Apr 13 2011 |
| Event | 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: Jan 23 2011 → Jan 27 2011 |
Other
| Other | 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 |
|---|---|
| Country | Mexico |
| City | Cancun |
| Period | 1/23/11 → 1/27/11 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering
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Cite this
Yan, J., & Pan, T. (2011). An ultra-high sensitivity, capacitive pressure sensor using ionic liquid. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 557-560). [5734485] https://doi.org/10.1109/MEMSYS.2011.5734485