An ultra-high sensitivity, capacitive pressure sensor using ionic liquid

John Yan; Tingrui Pan

doi:10.1109/MEMSYS.2011.5734485

An ultra-high sensitivity, capacitive pressure sensor using ionic liquid

John Yan, Tingrui Pan

Biomedical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

We introduce a novel, microfluidic capacitive pressure sensor which uses a high capacitance per unit area at the interface between the metal and ionic liquid. Unlike traditional pressure sensors, which use rigid material constructs, we employ conductive liquid and elastomeric constructs as the sensing medium - a design which is very responsive to applied pressure. A prototyped sensor achieves a sensitivity of 522.5 pF/mmHg.

Original language	English (US)
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages	557-560
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734485
State	Published - Apr 13 2011
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: Jan 23 2011 → Jan 27 2011

Other

Other	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Country	Mexico
City	Cancun
Period	1/23/11 → 1/27/11

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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AB - We introduce a novel, microfluidic capacitive pressure sensor which uses a high capacitance per unit area at the interface between the metal and ionic liquid. Unlike traditional pressure sensors, which use rigid material constructs, we employ conductive liquid and elastomeric constructs as the sensing medium - a design which is very responsive to applied pressure. A prototyped sensor achieves a sensitivity of 522.5 pF/mmHg.

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An ultra-high sensitivity, capacitive pressure sensor using ionic liquid

Abstract

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