An ultra-high sensitivity, capacitive pressure sensor using ionic liquid

John Yan, Tingrui Pan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

We introduce a novel, microfluidic capacitive pressure sensor which uses a high capacitance per unit area at the interface between the metal and ionic liquid. Unlike traditional pressure sensors, which use rigid material constructs, we employ conductive liquid and elastomeric constructs as the sensing medium - a design which is very responsive to applied pressure. A prototyped sensor achieves a sensitivity of 522.5 pF/mmHg.

Original languageEnglish (US)
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages557-560
Number of pages4
DOIs
StatePublished - Apr 13 2011
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: Jan 23 2011Jan 27 2011

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period1/23/111/27/11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Yan, J., & Pan, T. (2011). An ultra-high sensitivity, capacitive pressure sensor using ionic liquid. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 557-560). [5734485] https://doi.org/10.1109/MEMSYS.2011.5734485