An Easy to Manufacture Micro Gas Preconcentrator for Chemical Sensing Applications

Mitchell M. McCartney, Yuriy Zrodnikov, Alexander G. Fung, Michael K. Levasseur, Josephine M. Pedersen, Konstantin O. Zamuruyev, Alexander A. Aksenov, Nicholas Kenyon, Cristina E Davis

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We have developed a simple-to-manufacture microfabricated gas preconcentrator for MEMS-based chemical sensing applications. Cavities and microfluidic channels were created using a wet etch process with hydrofluoric acid, portions of which can be performed outside of a cleanroom, instead of the more common deep reactive ion etch process. The integrated heater and resistance temperature detectors (RTDs) were created with a photolithography-free technique enabled by laser etching. With only 28 V DC (0.1 A), a maximum heating rate of 17.6 °C/s was observed. Adsorption and desorption flow parameters were optimized to be 90 SCCM and 25 SCCM, respectively, for a multicomponent gas mixture. Under testing conditions using Tenax TA sorbent, the device was capable of measuring analytes down to 22 ppb with only a 2 min sample loading time using a gas chromatograph with a flame ionization detector. Two separate devices were compared by measuring the same chemical mixture; both devices yielded similar peak areas and widths (fwhm: 0.032-0.033 min), suggesting reproducibility between devices.

Original languageEnglish (US)
Pages (from-to)1167-1174
Number of pages8
JournalACS Sensors
Volume2
Issue number8
DOIs
StatePublished - Aug 25 2017

Fingerprint

Gas fuel manufacture
Gases
Hydrofluoric Acid
Detectors
Hydrofluoric acid
Photolithography
Sorbents
Heating rate
gases
Microfluidics
Gas mixtures
MEMS
Ionization
Etching
Desorption
flame ionization
Ions
Adsorption
Lasers
sorbents

Keywords

  • chemical sensor
  • detectors
  • gas preconcentrator
  • microelectromechanical systems (MEMS)
  • sorbent

ASJC Scopus subject areas

  • Bioengineering
  • Fluid Flow and Transfer Processes
  • Process Chemistry and Technology
  • Instrumentation

Cite this

McCartney, M. M., Zrodnikov, Y., Fung, A. G., Levasseur, M. K., Pedersen, J. M., Zamuruyev, K. O., ... Davis, C. E. (2017). An Easy to Manufacture Micro Gas Preconcentrator for Chemical Sensing Applications. ACS Sensors, 2(8), 1167-1174. https://doi.org/10.1021/acssensors.7b00289

An Easy to Manufacture Micro Gas Preconcentrator for Chemical Sensing Applications. / McCartney, Mitchell M.; Zrodnikov, Yuriy; Fung, Alexander G.; Levasseur, Michael K.; Pedersen, Josephine M.; Zamuruyev, Konstantin O.; Aksenov, Alexander A.; Kenyon, Nicholas; Davis, Cristina E.

In: ACS Sensors, Vol. 2, No. 8, 25.08.2017, p. 1167-1174.

Research output: Contribution to journalArticle

McCartney, MM, Zrodnikov, Y, Fung, AG, Levasseur, MK, Pedersen, JM, Zamuruyev, KO, Aksenov, AA, Kenyon, N & Davis, CE 2017, 'An Easy to Manufacture Micro Gas Preconcentrator for Chemical Sensing Applications', ACS Sensors, vol. 2, no. 8, pp. 1167-1174. https://doi.org/10.1021/acssensors.7b00289
McCartney MM, Zrodnikov Y, Fung AG, Levasseur MK, Pedersen JM, Zamuruyev KO et al. An Easy to Manufacture Micro Gas Preconcentrator for Chemical Sensing Applications. ACS Sensors. 2017 Aug 25;2(8):1167-1174. https://doi.org/10.1021/acssensors.7b00289
McCartney, Mitchell M. ; Zrodnikov, Yuriy ; Fung, Alexander G. ; Levasseur, Michael K. ; Pedersen, Josephine M. ; Zamuruyev, Konstantin O. ; Aksenov, Alexander A. ; Kenyon, Nicholas ; Davis, Cristina E. / An Easy to Manufacture Micro Gas Preconcentrator for Chemical Sensing Applications. In: ACS Sensors. 2017 ; Vol. 2, No. 8. pp. 1167-1174.
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