Abstract
We have developed a simple-to-manufacture microfabricated gas preconcentrator for MEMS-based chemical sensing applications. Cavities and microfluidic channels were created using a wet etch process with hydrofluoric acid, portions of which can be performed outside of a cleanroom, instead of the more common deep reactive ion etch process. The integrated heater and resistance temperature detectors (RTDs) were created with a photolithography-free technique enabled by laser etching. With only 28 V DC (0.1 A), a maximum heating rate of 17.6 °C/s was observed. Adsorption and desorption flow parameters were optimized to be 90 SCCM and 25 SCCM, respectively, for a multicomponent gas mixture. Under testing conditions using Tenax TA sorbent, the device was capable of measuring analytes down to 22 ppb with only a 2 min sample loading time using a gas chromatograph with a flame ionization detector. Two separate devices were compared by measuring the same chemical mixture; both devices yielded similar peak areas and widths (fwhm: 0.032-0.033 min), suggesting reproducibility between devices.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1167-1174 |
| Number of pages | 8 |
| Journal | ACS Sensors |
| Volume | 2 |
| Issue number | 8 |
| DOIs | |
| State | Published - Aug 25 2017 |
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Keywords
- chemical sensor
- detectors
- gas preconcentrator
- microelectromechanical systems (MEMS)
- sorbent
ASJC Scopus subject areas
- Bioengineering
- Fluid Flow and Transfer Processes
- Process Chemistry and Technology
- Instrumentation
Cite this
An Easy to Manufacture Micro Gas Preconcentrator for Chemical Sensing Applications. / McCartney, Mitchell M.; Zrodnikov, Yuriy; Fung, Alexander G.; Levasseur, Michael K.; Pedersen, Josephine M.; Zamuruyev, Konstantin O.; Aksenov, Alexander A.; Kenyon, Nicholas; Davis, Cristina E.
In: ACS Sensors, Vol. 2, No. 8, 25.08.2017, p. 1167-1174.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - An Easy to Manufacture Micro Gas Preconcentrator for Chemical Sensing Applications
AU - McCartney, Mitchell M.
AU - Zrodnikov, Yuriy
AU - Fung, Alexander G.
AU - Levasseur, Michael K.
AU - Pedersen, Josephine M.
AU - Zamuruyev, Konstantin O.
AU - Aksenov, Alexander A.
AU - Kenyon, Nicholas
AU - Davis, Cristina E
PY - 2017/8/25
Y1 - 2017/8/25
N2 - We have developed a simple-to-manufacture microfabricated gas preconcentrator for MEMS-based chemical sensing applications. Cavities and microfluidic channels were created using a wet etch process with hydrofluoric acid, portions of which can be performed outside of a cleanroom, instead of the more common deep reactive ion etch process. The integrated heater and resistance temperature detectors (RTDs) were created with a photolithography-free technique enabled by laser etching. With only 28 V DC (0.1 A), a maximum heating rate of 17.6 °C/s was observed. Adsorption and desorption flow parameters were optimized to be 90 SCCM and 25 SCCM, respectively, for a multicomponent gas mixture. Under testing conditions using Tenax TA sorbent, the device was capable of measuring analytes down to 22 ppb with only a 2 min sample loading time using a gas chromatograph with a flame ionization detector. Two separate devices were compared by measuring the same chemical mixture; both devices yielded similar peak areas and widths (fwhm: 0.032-0.033 min), suggesting reproducibility between devices.
AB - We have developed a simple-to-manufacture microfabricated gas preconcentrator for MEMS-based chemical sensing applications. Cavities and microfluidic channels were created using a wet etch process with hydrofluoric acid, portions of which can be performed outside of a cleanroom, instead of the more common deep reactive ion etch process. The integrated heater and resistance temperature detectors (RTDs) were created with a photolithography-free technique enabled by laser etching. With only 28 V DC (0.1 A), a maximum heating rate of 17.6 °C/s was observed. Adsorption and desorption flow parameters were optimized to be 90 SCCM and 25 SCCM, respectively, for a multicomponent gas mixture. Under testing conditions using Tenax TA sorbent, the device was capable of measuring analytes down to 22 ppb with only a 2 min sample loading time using a gas chromatograph with a flame ionization detector. Two separate devices were compared by measuring the same chemical mixture; both devices yielded similar peak areas and widths (fwhm: 0.032-0.033 min), suggesting reproducibility between devices.
KW - chemical sensor
KW - detectors
KW - gas preconcentrator
KW - microelectromechanical systems (MEMS)
KW - sorbent
UR - http://www.scopus.com/inward/record.url?scp=85028318323&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85028318323&partnerID=8YFLogxK
U2 - 10.1021/acssensors.7b00289
DO - 10.1021/acssensors.7b00289
M3 - Article
C2 - 28753000
AN - SCOPUS:85028318323
VL - 2
SP - 1167
EP - 1174
JO - ACS Sensors
JF - ACS Sensors
SN - 2379-3694
IS - 8
ER -