A unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and composition

B. L. Chua, Z. Li, D. T. McCormick, W. P. Shih, N. C. Tien, A. S. Wexler, D. A. Niemeier, B. Holmen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Scopus citations

Abstract

To miniaturize airborne particulates sizing and counting apparatus for ubiquitous deployment in air quality monitoring and epidemiological studies, we developed a unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and composition. It consumes relatively low power at 150mW or less, and operates with either single or multiple discharge electrodes. Potential difference of several kilovolts is maintained between the discharge electrodes within a chip size of less than 1 cm 2 without substrate breakdown or undesired sparkover. Mechanical oscillation of discharge electrode due to elecrrohydrodynamic effects is minimized. Corona charging currents of more than 40μA was achieved before streamers breakdown. Laplacian field simulation for both single and dual cathode design was performed using ANSYS™.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages261-264
Number of pages4
StatePublished - 2004
Event17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands
Duration: Jan 25 2004Jan 29 2004

Other

Other17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest
CountryNetherlands
CityMaastricht
Period1/25/041/29/04

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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    Chua, B. L., Li, Z., McCormick, D. T., Shih, W. P., Tien, N. C., Wexler, A. S., Niemeier, D. A., & Holmen, B. (2004). A unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and composition. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 261-264)