A new micro- and nanofabrication method, stepwise contraction and adsorption nanolithography (SCAN), and its feasibility was demonstrated by the production of multicomponent micro-and nanostructures. The main features of SCAN are its flexibility to wide variety of materials and compatibility to combine with well-established microlithography for further miniaturization. SCAN was performed in one dimension to produce multicolored, high-density arrays of lines, and monocomponent line gratings with a pitch size less than 100nm. The experiments have indicated the SCAN, in conjunction with well-established microlithography, which facilitates the miniaturization of complex microstuctures. The results show that other materials, such as metal and semiconductor nanoparticles and small molecules, could also be used as inks in SCAN.
ASJC Scopus subject areas
- Engineering (miscellaneous)