Abstract
In this paper, we present a remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. A SU-8 polymer layer deposited on the top of a gold sacrificial layer was used as the valve structural material. A constant DC current obtained via a telemetry link was used to electrochemically dissolve the gold sacrificial layer and activate the valves. 3×3 and 4×4 arrays each containing three different size valves (50×50, 100×100 and 200×200 μm2) were fabricated and tested. A current density of 35 mA/cm2 resulted in the dissolution of a 3000Å gold sacrificial layer in 30 seconds with the final release completed in 1-2 minutes.
Original language | English (US) |
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Title of host publication | TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 115-118 |
Number of pages | 4 |
Volume | 1 |
ISBN (Electronic) | 0780377311, 9780780377318 |
DOIs | |
State | Published - Jan 1 2003 |
Externally published | Yes |
Event | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: Jun 8 2003 → Jun 12 2003 |
Other
Other | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers |
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Country | United States |
City | Boston |
Period | 6/8/03 → 6/12/03 |
Keywords
- Biological materials
- Biomedical materials
- Biomembranes
- Fabrication
- Gold
- Microvalves
- Polymers
- Telemetry
- Thermal conductivity
- Valves
ASJC Scopus subject areas
- Electrical and Electronic Engineering