A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems

Tingrui Pan; Wei Zheng; Ming Lei; B. Cavanagh; B. Ziaie

doi:10.1109/SENSOR.2003.1215266

A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems

Tingrui Pan, Wei Zheng, Ming Lei, B. Cavanagh, B. Ziaie

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

In this paper, we present a remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. A SU-8 polymer layer deposited on the top of a gold sacrificial layer was used as the valve structural material. A constant DC current obtained via a telemetry link was used to electrochemically dissolve the gold sacrificial layer and activate the valves. 3×3 and 4×4 arrays each containing three different size valves (50×50, 100×100 and 200×200 μm²) were fabricated and tested. A current density of 35 mA/cm² resulted in the dissolution of a 3000Å gold sacrificial layer in 30 seconds with the final release completed in 1-2 minutes.

Original language	English (US)
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	115-118
Number of pages	4
Volume	1
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1215266
State	Published - Jan 1 2003
Externally published	Yes
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: Jun 8 2003 → Jun 12 2003

Other

Other	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country	United States
City	Boston
Period	6/8/03 → 6/12/03

Keywords

Biological materials
Biomedical materials
Biomembranes
Fabrication
Gold
Microvalves
Polymers
Telemetry
Thermal conductivity
Valves

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1109/SENSOR.2003.1215266

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Pan, T., Zheng, W., Lei, M., Cavanagh, B., & Ziaie, B. (2003). A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (Vol. 1, pp. 115-118). [1215266] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215266

A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. / Pan, Tingrui; Zheng, Wei; Lei, Ming; Cavanagh, B.; Ziaie, B.

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2003. p. 115-118 1215266.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Pan, T, Zheng, W, Lei, M, Cavanagh, B & Ziaie, B 2003, A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. vol. 1, 1215266, Institute of Electrical and Electronics Engineers Inc., pp. 115-118, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 6/8/03. https://doi.org/10.1109/SENSOR.2003.1215266

Pan T, Zheng W, Lei M, Cavanagh B, Ziaie B. A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1. Institute of Electrical and Electronics Engineers Inc. 2003. p. 115-118. 1215266 https://doi.org/10.1109/SENSOR.2003.1215266

Pan, Tingrui ; Zheng, Wei ; Lei, Ming ; Cavanagh, B. ; Ziaie, B. / A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2003. pp. 115-118

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abstract = "In this paper, we present a remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. A SU-8 polymer layer deposited on the top of a gold sacrificial layer was used as the valve structural material. A constant DC current obtained via a telemetry link was used to electrochemically dissolve the gold sacrificial layer and activate the valves. 3×3 and 4×4 arrays each containing three different size valves (50×50, 100×100 and 200×200 μm2) were fabricated and tested. A current density of 35 mA/cm2 resulted in the dissolution of a 3000{\AA} gold sacrificial layer in 30 seconds with the final release completed in 1-2 minutes.",

keywords = "Biological materials, Biomedical materials, Biomembranes, Fabrication, Gold, Microvalves, Polymers, Telemetry, Thermal conductivity, Valves",

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N2 - In this paper, we present a remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. A SU-8 polymer layer deposited on the top of a gold sacrificial layer was used as the valve structural material. A constant DC current obtained via a telemetry link was used to electrochemically dissolve the gold sacrificial layer and activate the valves. 3×3 and 4×4 arrays each containing three different size valves (50×50, 100×100 and 200×200 μm2) were fabricated and tested. A current density of 35 mA/cm2 resulted in the dissolution of a 3000Å gold sacrificial layer in 30 seconds with the final release completed in 1-2 minutes.

AB - In this paper, we present a remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. A SU-8 polymer layer deposited on the top of a gold sacrificial layer was used as the valve structural material. A constant DC current obtained via a telemetry link was used to electrochemically dissolve the gold sacrificial layer and activate the valves. 3×3 and 4×4 arrays each containing three different size valves (50×50, 100×100 and 200×200 μm2) were fabricated and tested. A current density of 35 mA/cm2 resulted in the dissolution of a 3000Å gold sacrificial layer in 30 seconds with the final release completed in 1-2 minutes.

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A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems

Abstract

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Keywords

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