A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems

Tingrui Pan; Wei Zheng; Ming Lei; B. Cavanagh; B. Ziaie

doi:10.1109/SENSOR.2003.1215266

A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems

Tingrui Pan, Wei Zheng, Ming Lei, B. Cavanagh, B. Ziaie

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

In this paper, we present a remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. A SU-8 polymer layer deposited on the top of a gold sacrificial layer was used as the valve structural material. A constant DC current obtained via a telemetry link was used to electrochemically dissolve the gold sacrificial layer and activate the valves. 3×3 and 4×4 arrays each containing three different size valves (50×50, 100×100 and 200×200 μm²) were fabricated and tested. A current density of 35 mA/cm² resulted in the dissolution of a 3000Å gold sacrificial layer in 30 seconds with the final release completed in 1-2 minutes.

Original language	English (US)
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	115-118
Number of pages	4
Volume	1
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1215266
Publication status	Published - Jan 1 2003
Externally published	Yes
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: Jun 8 2003 → Jun 12 2003

Other

Other	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country	United States
City	Boston
Period	6/8/03 → 6/12/03

Fingerprint

Keywords

Biological materials
Biomedical materials
Biomembranes
Fabrication
Gold
Microvalves
Polymers
Telemetry
Thermal conductivity
Valves

ASJC Scopus subject areas

Electrical and Electronic Engineering

Cite this

Pan, T., Zheng, W., Lei, M., Cavanagh, B., & Ziaie, B. (2003). A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (Vol. 1, pp. 115-118). [1215266] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215266

A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. / Pan, Tingrui; Zheng, Wei; Lei, Ming; Cavanagh, B.; Ziaie, B.

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2003. p. 115-118 1215266.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Pan, T, Zheng, W, Lei, M, Cavanagh, B & Ziaie, B 2003, A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. vol. 1, 1215266, Institute of Electrical and Electronics Engineers Inc., pp. 115-118, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 6/8/03. https://doi.org/10.1109/SENSOR.2003.1215266

Pan T, Zheng W, Lei M, Cavanagh B, Ziaie B. A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1. Institute of Electrical and Electronics Engineers Inc. 2003. p. 115-118. 1215266 https://doi.org/10.1109/SENSOR.2003.1215266

Pan, Tingrui ; Zheng, Wei ; Lei, Ming ; Cavanagh, B. ; Ziaie, B. / A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2003. pp. 115-118

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Access to Document

10.1109/SENSOR.2003.1215266