A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems

Tingrui Pan, Wei Zheng, Ming Lei, B. Cavanagh, B. Ziaie

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In this paper, we present a remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. A SU-8 polymer layer deposited on the top of a gold sacrificial layer was used as the valve structural material. A constant DC current obtained via a telemetry link was used to electrochemically dissolve the gold sacrificial layer and activate the valves. 3×3 and 4×4 arrays each containing three different size valves (50×50, 100×100 and 200×200 μm2) were fabricated and tested. A current density of 35 mA/cm2 resulted in the dissolution of a 3000Å gold sacrificial layer in 30 seconds with the final release completed in 1-2 minutes.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages115-118
Number of pages4
Volume1
ISBN (Electronic)0780377311, 9780780377318
DOIs
StatePublished - Jan 1 2003
Externally publishedYes
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period6/8/036/12/03

Keywords

  • Biological materials
  • Biomedical materials
  • Biomembranes
  • Fabrication
  • Gold
  • Microvalves
  • Polymers
  • Telemetry
  • Thermal conductivity
  • Valves

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Pan, T., Zheng, W., Lei, M., Cavanagh, B., & Ziaie, B. (2003). A remotely adjustable check-valve array with an electrochemical release mechanism for implantable biomedical microsystems. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (Vol. 1, pp. 115-118). [1215266] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215266