A microdroplet-based capacitive sensing matrix for tactile applications

B. Nie, R. Li, James D Brandt, Tingrui Pan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we present a highly sensitive microdroplet-based interfacial capacitive sensor matrix device, achieving ultrahigh sensitivity of 0.4nF/kPa and minimal detectable pressure of 33Pa at a 3×3×0.2mm³ packaging. The microdroplet-based sensor is comprised of an array of nanoliter ionic droplets sandwiched between two flexible substrates with patterned transparent electrodes. The sensing principle primarily relies on high elasticity of the sensing droplet and large capacitance presented at the electrode-electrolyte interface. Theoretical analyses and experimental investigations on several design parameters are thoroughly conducted to characterize. Finally, the microdroplet-based pressure sensor is successfully utilized for tactile sensing applications, such as Braille characters scanning and non-invasive cardiovascular pressure recording.

Original languageEnglish (US)
Title of host publication2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014
EditorsMehran Mehregany, Mark G. Allen
PublisherTransducer Research Foundation
Pages351-354
Number of pages4
ISBN (Electronic)9780964002494
StatePublished - Jan 1 2014
Event2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014 - Hilton Head Island, United States
Duration: Jun 8 2014Jun 12 2014

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014
CountryUnited States
CityHilton Head Island
Period6/8/146/12/14

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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  • Cite this

    Nie, B., Li, R., Brandt, J. D., & Pan, T. (2014). A microdroplet-based capacitive sensing matrix for tactile applications. In M. Mehregany, & M. G. Allen (Eds.), 2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014 (pp. 351-354). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation.