A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal

B. L. Chua, M. Zhang, J. M. Huber, R. G. Broeke, A. S. Wexler, N. C. Tien, D. A. Niemeier, B. A. Holmen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

To address the demand for high performance localized air filtration systems, we developed a configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. It consumes low power of less than 4mW and is able to operate at a flowrate of 1.6L/min per device. The unipolar charger and separator electrodes are fabricated on the same substrate for close proximity to minimize charge loss due to particle diffusion. A straight air channel with uniform cross-section between the inlet and outlet minimizes pressure loss, maximizes operational flow rate, and ensures laminar flow for effective particle separation and removal. A flow divider before the outlet physically separates the particle-laden and cleaned air before they exit the separator electrodes' electric field.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages718-721
Number of pages4
DOIs
StatePublished - 2005
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: Jan 30 2005Feb 3 2005

Other

Other18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
CountryUnited States
CityMiami Beach, FL
Period1/30/052/3/05

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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